> Academic opportunities > PHD positions

Catalysis effect in direct bonding mecanisme

Technological challenge: Emerging materials and processes for nanotechnologies and microelectronics (learn more)

Department: Département des Plateformes Technologiques (LETI)

Laboratory: Laboratoire

Start Date: 01-10-2022

Location: Grenoble

CEA Code: SL-DRT-22-0612

Contact: vincent.larrey@cea.fr

The aim of this study is to study in detail the impact of the intentional addition of specific molecules at the bonding interface such as amino alcohol or strong bases. Their implementation with interfaces of different materials will make it possible to specify all the bonding mechanisms of said materials. A combination with plasma activation will also be at the center of this study. Several axes will therefore be implemented: Part of the study will consist in an accurate characterization the quantity of molecules on the surface according to different modes of deposition (steam, centrifugation). In parallel, another axis of this study will be to quantify the impact of these molecules on the bonding mechanisms of different materials (SiO2, Si3N4, AlN, InP, AsGa ...). A final axis will be to vary the quantity of interfacial water with bonding carried out under different atmospheres and / or with prior plasma activation. This last axis will make it possible to seek the optimal quantity of water in these specific conditions, hoping to reduce it to a minimum. The candidate will be trained in all the technological tools allowing direct bonding (chemical cleaning, CMP, bonding, thermal annealing) and their characterization (infrared spectroscopy, acoustic microscopy, measurement of anhydrous bonding energy, X-ray reflectivity , mass spectroscopy ...).

See all positions Download the offer (.zip)

Email Bookmark and Share