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Electrical tuning of MEMS dynamics

Technological challenge: Emerging materials and processes for nanotechnologies and microelectronics (learn more)

Department: Département Composants Silicium (LETI)

Laboratory: Laboratoire des circuits intégrés pour la Gestion de l'Energie, les Capteurs et Actionneurs

Start Date: 01-09-2022

Location: Grenoble

CEA Code: SL-DRT-22-0279

Contact: gael.pillonnet@cea.fr

The Phd objective is to explore electromechanical tuning techniques dynamically to modulate the resonant frequency and quality factor of electrically-coupled MEMS devices.

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