Scientific direction Development of key enabling technologies
Transfer of knowledge to industry

PhD : selection by topics

Development of innovative piezoelectric micromachined ultrasound transducer (pMUT) for automotive applications

Département Composants Silicium (LETI)

Laboratoire Composants Micro-Capteurs



The potential use of piezoelectric micromachined ultrasound transducers (pMUT) within smartphones, tablets and connected devices have raised a growing interest during the last years to build new fingerprint sensors and achieve better, low-power range-finder. To meet the specific needs of these new applications, the performances of pMUT have to be increased. This Ph.D. thesis aims at building new devices to cope with the requirements of automobile applications. The conception, the fabrication and the characterization of the pMUT will be investigated by the Ph.D student. The conception will be based on both analytical approaches and finite elements modelling (ANSYS, Comsol Multiphysics). The fabrication process will be achieved within the 8 inches MEMS Platform of CEA-LETI with the strong support of the CEA teams. The characterization, mostly probe measurements at the wafer level, will confirm and refine the models. The relevance of the devices for the targeted applications will be evaluated. For this purpose, the Ph.D. student is expected to have strong background in mechanics. He will tackle both scientific and technological challenges. He should be an autonomous team player.

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