Département Composants Silicium (LETI)
Laboratoire Composants Micro-Capteurs
While MEMS microphones performances stagnate, specifications imposed by voice recongnition or noise cancellation are still not addressed. The counter-electrode, placed in front of the membrane to realize a capacitive detection, is the main limit, by disturbing acoustic path. Several ways are explored to remove the electrode and increase performances: - Detection change: piezoelectricity (Vesper), piezoresistivity (CEA-Léti) - Capacitive comb all around the membrane (Infineon) A new architecture patented by CEA conserves capacitive detection and its avantages while removing induced noises. The thesis work is to design, produce and test a first device taking advantage of this architecture.