Scientific direction Development of key enabling technologies
Transfer of knowledge to industry

PhD : selection by topics

New architecture MEMS microphone realization

Département Composants Silicium (LETI)

Laboratoire Composants Micro-Capteurs

01-09-2017

SL-DRT-17-0005

loic.joet@cea.fr

While MEMS microphones performances stagnate, specifications imposed by voice recongnition or noise cancellation are still not addressed. The counter-electrode, placed in front of the membrane to realize a capacitive detection, is the main limit, by disturbing acoustic path. Several ways are explored to remove the electrode and increase performances: - Detection change: piezoelectricity (Vesper), piezoresistivity (CEA-Léti) - Capacitive comb all around the membrane (Infineon) A new architecture patented by CEA conserves capacitive detection and its avantages while removing induced noises. The thesis work is to design, produce and test a first device taking advantage of this architecture.

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